%0 Journal Aritcle %T The application of localized surface plasmons resonance in Ag nanoparticles assisted Si chemical etching %A Musselman, Kevin P. %A Ding, Ruiqiang %A Dai, Han %A Li, Meicheng %A Huang, Jinjer %A Li, Yingfeng %A Trevor, Mwenya %D 2014 %I UWSpace %F Musselman, Kevin P.2014 %U http://hdl.handle.net/10012/13254