%0 Journal Aritcle %T A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms %A Yeow, John %A Wong, Lawrence %A Sun, Zhendong %A Suo, Xudong %A Sun, Weijie %A Zheng, Zhou %D 2015 %I UWSpace %F Yeow, John2015 %U http://hdl.handle.net/10012/11308